The symposium is expected to define a platform for the discussion of the main challenges in this research field bringing together scientists, engineers and students working on all the aspects of directed self assembly of block copolymers, from fundamental physics and chemistry issues to the final application for the fabrication of functional devices. For this reason we aim for a mix of industrial and academic contributions, to tackle practical as well as basic aspects of this technology.

 

The scope of the Symposium will include:

  • Materials (BCP, surface control layers, additives, ...)
  • BCP Processing
  • DSA-friendly design and OPC
  • Pattern transfer
  • Simulations and modelling
  • 2D and 3D Metrology
  • Pattern placement
  • Integration schemes
  • DSA extendibility